I300I Demonstration Test Method

joel.zy

I300I(国际300毫米推动专业协会)DemonstrationTestMethod

338

看来是个好资料，DOWN下来慢慢学习一下。先多谢楼主了，下面帮忙摘要出DemonstrationTestMethod(DTM)文章的一些信息来。

Abstract:Revision1oftheDemonstrationTestMethod(DTM)incorporatestheexperienceofdeployingthe
DTMinmultipletestsandreflectsthechangingrequirementsfor1998and180nmprocesses.The
International300mmInitiative(I300I)DTMisaguidelineforcharacterizingprocessperformance
andreliabilityofsemiconductorICprocessandmetrologyequipmentatanydevelopmentmaturity.
Itprovidesamethodforexperimentationscaledtothematurityofthetoolorprocessbeingtested.
TheDTMiscomposedofthreestages:determinethematurityofthetoolorprocesstobetested,
selectandexecutetheappropriatetesting,andreportthetestresultsinastandardizedformat.

Keywords:Equipment,TestMethods,ReliabilityTesting
Authors:SteveFultonandDavidCarswell
Approvals:SteveFulton,Author/ReliabilityProgramManager
RandyGoodall,AssociateDirectorofProductivityandInfrastructure
AshwinGhatalia,DirectorofProductivityandInfrastructure
LaurieModrey,TechnicalInformationTransferTeamLeader

cliffcrag

是个好资料，顶顶。。

zlh95222

好东西，收藏了！

zhangxw

DemonstrationTestMethod(DTM):该名词中文怎样翻译才准确

wuxianglin2000

还是没法下载！